PECVD -Part 1

Course subject(s) Module 4. Thin Film Processing

In the preceding videos we have introduced some important new concepts for thin film technologies. We will now turn our attention to the depostion techniques and tools used to grow the thin layers. In this video you will learn about the plasma enhanced chemical vapour deposition, or PECVD, which is primarily used for thin film silicon alloys.

PECVD -Part 1

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